3D-structures with arbitrary shapes created in negative resists by grayscale proton beam writing
Saved in:
| Title: | 3D-structures with arbitrary shapes created in negative resists by grayscale proton beam writing |
|---|---|
| Authors: | Menzel, F. fmenzel@physik.uni-leipzig.de, Spemann, D.1, Koal, T.1, Butz, T.1 |
| Source: | Nuclear Instruments & Methods in Physics Research Section B. Oct2011, Vol. 269 Issue 20, p2427-2430. 4p. |
| Subjects: | Proton beams, Microlithography, Microstructure, Three-manifolds (Topology), Irradiation, Simulation methods & models, Microphotometry |
| Abstract: | Abstract: The direct and maskless technique of proton beam writing (PBW) was used for grayscale lithography which allows to create 3D microstructures with arbitrary surface topographies. For this purpose, several micrometer thick layers of the negative resists ma-N and SU-8 were irradiated with 2.25MeV H+ and 1.125MeV in arbitrary shapes using different fluences on different areas with values smaller than the threshold fluence for complete exposure. These irradiations result in multilevel microstructures, whose heights increase with increasing fluence. However, the comparison of the measured structure height with calculated predictions from SRIM simulations disproves the assumption that the structure height is proportional to the linear energy transfer (LET). In fact, the fluence reduction below the threshold for sufficient exposure is responsible for grayscale structuring due to reduced etching of the insufficiently exposed regions. The artifacts obtained with the first grayscale structures created by PBW in ma-N and strongly affecting the structure quality could be reduced by optimizing the scanning procedure, e.g. reducing the pixel distance. Therewith, a micro-Fresnel-lens could be fabricated in ma-N. The first PBW grayscale structures in SU-8 exhibited very strong mechanical instabilities which could be reduced by the use of a post exposure bake step, normally omitted for PBW with SU-8. [Copyright &y& Elsevier] |
| Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
|---|---|
| Header | DbId: egs DbLabel: Engineering Source An: 66227394 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
| IllustrationInfo | |
| Items | – Name: Title Label: Title Group: Ti Data: 3D-structures with arbitrary shapes created in negative resists by grayscale proton beam writing – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Menzel%2C+F%2E%22">Menzel, F.</searchLink><i> fmenzel@physik.uni-leipzig.de</i><br /><searchLink fieldCode="AR" term="%22Spemann%2C+D%2E%22">Spemann, D.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Koal%2C+T%2E%22">Koal, T.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Butz%2C+T%2E%22">Butz, T.</searchLink><relatesTo>1</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Nuclear+Instruments+%26+Methods+in+Physics+Research+Section+B%22">Nuclear Instruments & Methods in Physics Research Section B</searchLink>. Oct2011, Vol. 269 Issue 20, p2427-2430. 4p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Proton+beams%22">Proton beams</searchLink><br /><searchLink fieldCode="DE" term="%22Microlithography%22">Microlithography</searchLink><br /><searchLink fieldCode="DE" term="%22Microstructure%22">Microstructure</searchLink><br /><searchLink fieldCode="DE" term="%22Three-manifolds+%28Topology%29%22">Three-manifolds (Topology)</searchLink><br /><searchLink fieldCode="DE" term="%22Irradiation%22">Irradiation</searchLink><br /><searchLink fieldCode="DE" term="%22Simulation+methods+%26+models%22">Simulation methods & models</searchLink><br /><searchLink fieldCode="DE" term="%22Microphotometry%22">Microphotometry</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: Abstract: The direct and maskless technique of proton beam writing (PBW) was used for grayscale lithography which allows to create 3D microstructures with arbitrary surface topographies. For this purpose, several micrometer thick layers of the negative resists ma-N and SU-8 were irradiated with 2.25MeV H+ and 1.125MeV in arbitrary shapes using different fluences on different areas with values smaller than the threshold fluence for complete exposure. These irradiations result in multilevel microstructures, whose heights increase with increasing fluence. However, the comparison of the measured structure height with calculated predictions from SRIM simulations disproves the assumption that the structure height is proportional to the linear energy transfer (LET). In fact, the fluence reduction below the threshold for sufficient exposure is responsible for grayscale structuring due to reduced etching of the insufficiently exposed regions. The artifacts obtained with the first grayscale structures created by PBW in ma-N and strongly affecting the structure quality could be reduced by optimizing the scanning procedure, e.g. reducing the pixel distance. Therewith, a micro-Fresnel-lens could be fabricated in ma-N. The first PBW grayscale structures in SU-8 exhibited very strong mechanical instabilities which could be reduced by the use of a post exposure bake step, normally omitted for PBW with SU-8. [Copyright &y& Elsevier] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=66227394 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.nimb.2011.02.060 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 4 StartPage: 2427 Subjects: – SubjectFull: Proton beams Type: general – SubjectFull: Microlithography Type: general – SubjectFull: Microstructure Type: general – SubjectFull: Three-manifolds (Topology) Type: general – SubjectFull: Irradiation Type: general – SubjectFull: Simulation methods & models Type: general – SubjectFull: Microphotometry Type: general Titles: – TitleFull: 3D-structures with arbitrary shapes created in negative resists by grayscale proton beam writing Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Menzel, F. – PersonEntity: Name: NameFull: Spemann, D. – PersonEntity: Name: NameFull: Koal, T. – PersonEntity: Name: NameFull: Butz, T. IsPartOfRelationships: – BibEntity: Dates: – D: 15 M: 10 Text: Oct2011 Type: published Y: 2011 Identifiers: – Type: issn-print Value: 0168583X Numbering: – Type: volume Value: 269 – Type: issue Value: 20 Titles: – TitleFull: Nuclear Instruments & Methods in Physics Research Section B Type: main |
| ResultId | 1 |
