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Acoustic mode converters micromachined in silicon by proton beam writing

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Title: Acoustic mode converters micromachined in silicon by proton beam writing
Authors: Scholz, U.1 u.scholz83@gmx.de, Menzel, F.1 fmenzel@physik.uni-leipzig.de, Pluta, M.2 pluta@physik.uni-leipzig.de, Grill, W.2 grill@physik.uni-leipzig.de, Butz, T.1 butz@physik.uni-leipzig.de
Source: Nuclear Instruments & Methods in Physics Research Section B. Oct2011, Vol. 269 Issue 20, p2452-2456. 5p.
Subjects: Microelectromechanical systems, Silicon, Proton beams, Acoustical engineering, Microstructure, Inclined planes
Abstract: Abstract: Proton beam writing is a powerful tool for the production of microstructures for acoustic applications because it allows to create structures inclined to the original sample surface which therefore can act as acoustic mode converters. We report on experiments, finding optimal structure sizes in p-type 12Ωcm silicon for this purpose. For the creation of the structures the proton beam at the LIPSION laboratory was used. Furthermore, by investigating the micromachined silicon with a phase sensitive acoustic microscope we give evidence that inclined structures such as rods and walls can be used to change the mode of acoustic waves in the crystal. [Copyright &y& Elsevier]
Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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  Data: Acoustic mode converters micromachined in silicon by proton beam writing
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  Data: <searchLink fieldCode="AR" term="%22Scholz%2C+U%2E%22">Scholz, U.</searchLink><relatesTo>1</relatesTo><i> u.scholz83@gmx.de</i><br /><searchLink fieldCode="AR" term="%22Menzel%2C+F%2E%22">Menzel, F.</searchLink><relatesTo>1</relatesTo><i> fmenzel@physik.uni-leipzig.de</i><br /><searchLink fieldCode="AR" term="%22Pluta%2C+M%2E%22">Pluta, M.</searchLink><relatesTo>2</relatesTo><i> pluta@physik.uni-leipzig.de</i><br /><searchLink fieldCode="AR" term="%22Grill%2C+W%2E%22">Grill, W.</searchLink><relatesTo>2</relatesTo><i> grill@physik.uni-leipzig.de</i><br /><searchLink fieldCode="AR" term="%22Butz%2C+T%2E%22">Butz, T.</searchLink><relatesTo>1</relatesTo><i> butz@physik.uni-leipzig.de</i>
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  Data: <searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Silicon%22">Silicon</searchLink><br /><searchLink fieldCode="DE" term="%22Proton+beams%22">Proton beams</searchLink><br /><searchLink fieldCode="DE" term="%22Acoustical+engineering%22">Acoustical engineering</searchLink><br /><searchLink fieldCode="DE" term="%22Microstructure%22">Microstructure</searchLink><br /><searchLink fieldCode="DE" term="%22Inclined+planes%22">Inclined planes</searchLink>
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  Data: Abstract: Proton beam writing is a powerful tool for the production of microstructures for acoustic applications because it allows to create structures inclined to the original sample surface which therefore can act as acoustic mode converters. We report on experiments, finding optimal structure sizes in p-type 12Ωcm silicon for this purpose. For the creation of the structures the proton beam at the LIPSION laboratory was used. Furthermore, by investigating the micromachined silicon with a phase sensitive acoustic microscope we give evidence that inclined structures such as rods and walls can be used to change the mode of acoustic waves in the crystal. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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