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Fabrication of Multiple Slanted Microstructures on Silica Glass by Laser-Induced Backside Wet Etching.

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Title: Fabrication of Multiple Slanted Microstructures on Silica Glass by Laser-Induced Backside Wet Etching.
Authors: Sato, Tadatake1 sato-tadatake@aist.go.jp, Kurosaki, Ryozo1, Kawaguchi, Yoshizo1, Narazaki, Aiko1, Niino, Hiroyuki1
Source: Journal of Laser Micro / Nanoengineering. 2010, Vol. 5 Issue 3, p256-262. 7p. 1 Color Photograph, 4 Black and White Photographs, 2 Diagrams, 1 Chart, 1 Graph.
Subjects: Microstructure, Glass etching, Laser microscopy, Micromachining, Engraving, Silicon
Abstract: Slanted microstructures were fabricated on silica glass by laser-induced backside wet etching (LIBWE) with gradual shift of the area irradiated by normal incidence. Slanted microtrenches with tilting angles up to about 30 degrees could be fabricated by lateral shift of the irradiated area with the speed of ∼5.0 nm·pulse-1 under the conditions showing the vertical etching with rate of 7.0 - 11 nm·pulse-1. Tilting angle could be controlled by the speed of lateral shift the irradiated area during the etching. Such structures were formed as a result of both lateral and vertical etching at the etch front. The trench structure fabricated by drastic shift of the irradiated area indicated that the etching of the sidewalls occurred at the area with height of around 400 nm. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Laser Micro / Nanoengineering is the property of Japan Laser Processing Society and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 71702495
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PubType: Academic Journal
PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Fabrication of Multiple Slanted Microstructures on Silica Glass by Laser-Induced Backside Wet Etching.
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  Data: <searchLink fieldCode="AR" term="%22Sato%2C+Tadatake%22">Sato, Tadatake</searchLink><relatesTo>1</relatesTo><i> sato-tadatake@aist.go.jp</i><br /><searchLink fieldCode="AR" term="%22Kurosaki%2C+Ryozo%22">Kurosaki, Ryozo</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Kawaguchi%2C+Yoshizo%22">Kawaguchi, Yoshizo</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Narazaki%2C+Aiko%22">Narazaki, Aiko</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Niino%2C+Hiroyuki%22">Niino, Hiroyuki</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Laser+Micro+%2F+Nanoengineering%22">Journal of Laser Micro / Nanoengineering</searchLink>. 2010, Vol. 5 Issue 3, p256-262. 7p. 1 Color Photograph, 4 Black and White Photographs, 2 Diagrams, 1 Chart, 1 Graph.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Microstructure%22">Microstructure</searchLink><br /><searchLink fieldCode="DE" term="%22Glass+etching%22">Glass etching</searchLink><br /><searchLink fieldCode="DE" term="%22Laser+microscopy%22">Laser microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Micromachining%22">Micromachining</searchLink><br /><searchLink fieldCode="DE" term="%22Engraving%22">Engraving</searchLink><br /><searchLink fieldCode="DE" term="%22Silicon%22">Silicon</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Slanted microstructures were fabricated on silica glass by laser-induced backside wet etching (LIBWE) with gradual shift of the area irradiated by normal incidence. Slanted microtrenches with tilting angles up to about 30 degrees could be fabricated by lateral shift of the irradiated area with the speed of ∼5.0 nm·pulse-1 under the conditions showing the vertical etching with rate of 7.0 - 11 nm·pulse-1. Tilting angle could be controlled by the speed of lateral shift the irradiated area during the etching. Such structures were formed as a result of both lateral and vertical etching at the etch front. The trench structure fabricated by drastic shift of the irradiated area indicated that the etching of the sidewalls occurred at the area with height of around 400 nm. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Laser Micro / Nanoengineering is the property of Japan Laser Processing Society and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.2961/jlmn.2010.03.0014
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      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 7
        StartPage: 256
    Subjects:
      – SubjectFull: Microstructure
        Type: general
      – SubjectFull: Glass etching
        Type: general
      – SubjectFull: Laser microscopy
        Type: general
      – SubjectFull: Micromachining
        Type: general
      – SubjectFull: Engraving
        Type: general
      – SubjectFull: Silicon
        Type: general
    Titles:
      – TitleFull: Fabrication of Multiple Slanted Microstructures on Silica Glass by Laser-Induced Backside Wet Etching.
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            NameFull: Sato, Tadatake
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            NameFull: Kurosaki, Ryozo
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            NameFull: Kawaguchi, Yoshizo
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            NameFull: Narazaki, Aiko
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            NameFull: Niino, Hiroyuki
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            – D: 01
              M: 12
              Text: 2010
              Type: published
              Y: 2010
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              Value: 5
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            – TitleFull: Journal of Laser Micro / Nanoengineering
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