Absolute total and partial electron ionization cross sections of C2F6

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Title: Absolute total and partial electron ionization cross sections of C2F6
Authors: Basner, R.1, Schmidt, M.1, Denisov, E.1, Lopata, P.2, Becker, K.2, Deutsch, H.3
Source: International Journal of Mass Spectrometry. Mar2002, Vol. 214 Issue 3, p365. 10p.
Subjects: Ionization (Atomic physics), Nuclear cross sections, Plasma etching
Abstract: We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C2F6) from threshold to 900 eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. Measurements were also made for tetrafluoromethane (CF4), which is perhaps the most thoroughly investigated complex polyatomic molecule in terms of ionization cross sections, in an effort to demonstrate the reliable performance of our apparatus. Our measurements for both CF4 and C2F6 are compared with other available experimental data and with calculated cross sections. [Copyright &y& Elsevier]
Copyright of International Journal of Mass Spectrometry is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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An: 7770899
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Mass+Spectrometry%22">International Journal of Mass Spectrometry</searchLink>. Mar2002, Vol. 214 Issue 3, p365. 10p.
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  Data: We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C2F6) from threshold to 900 eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. Measurements were also made for tetrafluoromethane (CF4), which is perhaps the most thoroughly investigated complex polyatomic molecule in terms of ionization cross sections, in an effort to demonstrate the reliable performance of our apparatus. Our measurements for both CF4 and C2F6 are compared with other available experimental data and with calculated cross sections. [Copyright &y& Elsevier]
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  Data: <i>Copyright of International Journal of Mass Spectrometry is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/S1387-3806(02)00541-9
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        Text: English
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      – SubjectFull: Nuclear cross sections
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      – SubjectFull: Plasma etching
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      – TitleFull: Absolute total and partial electron ionization cross sections of C2F6
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              Text: Mar2002
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              Y: 2002
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