Wafer scale submicron optical grating for the picometre measurement of aberrations and stitching errors in step and repeat cameras - Jourlin, Y.; Jay, J.; Pigeon, F.; Bouchet, G.; Parriaux, O.; van Dijk, P.; Pellens, R.; Topçu, S.; Alayli, Y.; Bonis, M. (Microelectronic Engineering, 2002)