Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining
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| Title: | Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining |
|---|---|
| Authors: | Strasser, M.1,2 marc.strasser@infineon.com, Aigner, R.1, Franosch, M.1, Wachutka, G.2 |
| Source: | Sensors & Actuators A: Physical. Apr2002, Vol. 97/98, p535. 8p. |
| Subjects: | Thermoelectric generators, Direct energy conversion |
| Abstract: | We report on miniaturized thermoelectric generators (TEGs) which are being developed to convert waste heat into a few microwatts of electrical power, sufficient to supply microelectronic circuitry. A BiCMOS realization using standard materials is favored to make these generators amenable to low cost applications. In order to optimize our device, the design and the material properties have been studied. The use of micromachining techniques allowed us to improve the thermal efficiency of the generator significantly. Low thermal conductivity of the thermoelectric materials proved to be the most important factor to increase the output power. The materials we have investigated are poly-Si and poly-SiGe. Experimental results obtained from fabricated devices show good agreement with the predictions of thermal simulations. [Copyright &y& Elsevier] |
| Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 7821655 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Strasser%2C+M%2E%22">Strasser, M.</searchLink><relatesTo>1,2</relatesTo><i> marc.strasser@infineon.com</i><br /><searchLink fieldCode="AR" term="%22Aigner%2C+R%2E%22">Aigner, R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Franosch%2C+M%2E%22">Franosch, M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Wachutka%2C+G%2E%22">Wachutka, G.</searchLink><relatesTo>2</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+A%3A+Physical%22">Sensors & Actuators A: Physical</searchLink>. Apr2002, Vol. 97/98, p535. 8p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Thermoelectric+generators%22">Thermoelectric generators</searchLink><br /><searchLink fieldCode="DE" term="%22Direct+energy+conversion%22">Direct energy conversion</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: We report on miniaturized thermoelectric generators (TEGs) which are being developed to convert waste heat into a few microwatts of electrical power, sufficient to supply microelectronic circuitry. A BiCMOS realization using standard materials is favored to make these generators amenable to low cost applications. In order to optimize our device, the design and the material properties have been studied. The use of micromachining techniques allowed us to improve the thermal efficiency of the generator significantly. Low thermal conductivity of the thermoelectric materials proved to be the most important factor to increase the output power. The materials we have investigated are poly-Si and poly-SiGe. Experimental results obtained from fabricated devices show good agreement with the predictions of thermal simulations. [Copyright &y& Elsevier] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/S0924-4247(01)00815-9 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: 535 Subjects: – SubjectFull: Thermoelectric generators Type: general – SubjectFull: Direct energy conversion Type: general Titles: – TitleFull: Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Strasser, M. – PersonEntity: Name: NameFull: Aigner, R. – PersonEntity: Name: NameFull: Franosch, M. – PersonEntity: Name: NameFull: Wachutka, G. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 04 Text: Apr2002 Type: published Y: 2002 Identifiers: – Type: issn-print Value: 09244247 Numbering: – Type: volume Value: 97/98 Titles: – TitleFull: Sensors & Actuators A: Physical Type: main |
| ResultId | 1 |
