Roca i Cabarrocas, P., Cariou, R., & Labrune, M. (2012). Low temperature plasma deposition of silicon thin films: From amorphous to crystalline. Journal of Non-Crystalline Solids, 358(17), 2000. https://doi.org/10.1016/j.jnoncrysol.2011.12.113
Chicago Style (17th ed.) CitationRoca i Cabarrocas, P., R. Cariou, and M. Labrune. "Low Temperature Plasma Deposition of Silicon Thin Films: From Amorphous to Crystalline." Journal of Non-Crystalline Solids 358, no. 17 (2012): 2000. https://doi.org/10.1016/j.jnoncrysol.2011.12.113.
MLA (9th ed.) CitationRoca i Cabarrocas, P., et al. "Low Temperature Plasma Deposition of Silicon Thin Films: From Amorphous to Crystalline." Journal of Non-Crystalline Solids, vol. 358, no. 17, 2012, p. 2000, https://doi.org/10.1016/j.jnoncrysol.2011.12.113.