APA (7th ed.) Citation

Perego, M., Seguini, G., & Fanciulli, M. (2013). ToF-SIMS study of phosphorus diffusion in low-dimensional silicon structures. Surface & Interface Analysis: SIA, 45(1), 386. https://doi.org/10.1002/sia.5001

Chicago Style (17th ed.) Citation

Perego, Michele, Gabriele Seguini, and Marco Fanciulli. "ToF-SIMS Study of Phosphorus Diffusion in Low-dimensional Silicon Structures." Surface & Interface Analysis: SIA 45, no. 1 (2013): 386. https://doi.org/10.1002/sia.5001.

MLA (9th ed.) Citation

Perego, Michele, et al. "ToF-SIMS Study of Phosphorus Diffusion in Low-dimensional Silicon Structures." Surface & Interface Analysis: SIA, vol. 45, no. 1, 2013, p. 386, https://doi.org/10.1002/sia.5001.