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Theoretical modelling of X-ray production in thin films characterization with electron probe:: Invariant embedding results

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Title: Theoretical modelling of X-ray production in thin films characterization with electron probe:: Invariant embedding results
Authors: Heluani, Silvia P. sperez@herrera.unt.edu.ar, Hoffmann, C.1
Source: Nuclear Instruments & Methods in Physics Research Section B. Nov2002, Vol. 196 Issue 3/4, p228. 11p.
Subjects: Invariant imbedding, Electron probe microanalysis, Thin films
Abstract: Employing the invariant embedding principle, theoretical expressions for the detected characteristic X-ray intensities generated in electron probe microanalysis of thin films are obtained. Characteristic X-ray emission from the elements present in a solid is calculated from the probabilities of the backscattered and transmitted electron trajectories within the film and the substrate. The theoretical expressions mentioned provide for the possibility of developing procedures for microanalysis directly from the experimental results without making approaches for the estimation of the φ(ρz) function.The procedure used permits to calculate the recorded X-rays as a function of incident beam voltage and also as a function of the sample thickness. The method presented here gives the possibility of obtaining calibration curves for thin films and multi-layers. The results obtained are found to agree with experimental ones. [Copyright &y& Elsevier]
Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 8784003
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Theoretical modelling of X-ray production in thin films characterization with electron probe:: Invariant embedding results
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Heluani%2C+Silvia+P%2E%22">Heluani, Silvia P.</searchLink><i> sperez@herrera.unt.edu.ar</i><br /><searchLink fieldCode="AR" term="%22Hoffmann%2C+C%2E%22">Hoffmann, C.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Nuclear+Instruments+%26+Methods+in+Physics+Research+Section+B%22">Nuclear Instruments & Methods in Physics Research Section B</searchLink>. Nov2002, Vol. 196 Issue 3/4, p228. 11p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Invariant+imbedding%22">Invariant imbedding</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+probe+microanalysis%22">Electron probe microanalysis</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Employing the invariant embedding principle, theoretical expressions for the detected characteristic X-ray intensities generated in electron probe microanalysis of thin films are obtained. Characteristic X-ray emission from the elements present in a solid is calculated from the probabilities of the backscattered and transmitted electron trajectories within the film and the substrate. The theoretical expressions mentioned provide for the possibility of developing procedures for microanalysis directly from the experimental results without making approaches for the estimation of the <f>φ(ρz)</f> function.The procedure used permits to calculate the recorded X-rays as a function of incident beam voltage and also as a function of the sample thickness. The method presented here gives the possibility of obtaining calibration curves for thin films and multi-layers. The results obtained are found to agree with experimental ones. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/S0168-583X(02)01288-0
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 11
        StartPage: 228
    Subjects:
      – SubjectFull: Invariant imbedding
        Type: general
      – SubjectFull: Electron probe microanalysis
        Type: general
      – SubjectFull: Thin films
        Type: general
    Titles:
      – TitleFull: Theoretical modelling of X-ray production in thin films characterization with electron probe:: Invariant embedding results
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Heluani, Silvia P.
      – PersonEntity:
          Name:
            NameFull: Hoffmann, C.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 11
              Text: Nov2002
              Type: published
              Y: 2002
          Identifiers:
            – Type: issn-print
              Value: 0168583X
          Numbering:
            – Type: volume
              Value: 196
            – Type: issue
              Value: 3/4
          Titles:
            – TitleFull: Nuclear Instruments & Methods in Physics Research Section B
              Type: main
ResultId 1