APA (7th ed.) Citation

Preda, I., Vivo, A., Demarcq, F., Berujon, S., Susini, J., & Ziegler, E. (2013). Ion beam etching of a flat silicon mirror surface: A study of the shape error evolution. Nuclear Instruments & Methods in Physics Research Section A, 710, 98. https://doi.org/10.1016/j.nima.2012.10.136

Chicago Style (17th ed.) Citation

Preda, I., A. Vivo, F. Demarcq, S. Berujon, J. Susini, and E. Ziegler. "Ion Beam Etching of a Flat Silicon Mirror Surface: A Study of the Shape Error Evolution." Nuclear Instruments & Methods in Physics Research Section A 710 (2013): 98. https://doi.org/10.1016/j.nima.2012.10.136.

MLA (9th ed.) Citation

Preda, I., et al. "Ion Beam Etching of a Flat Silicon Mirror Surface: A Study of the Shape Error Evolution." Nuclear Instruments & Methods in Physics Research Section A, vol. 710, 2013, p. 98, https://doi.org/10.1016/j.nima.2012.10.136.

Warning: These citations may not always be 100% accurate.