APA (7th ed.) Citation

Montoliu, C., Ferrando, N., Gosálvez, M. A., Cerdá, J., & Colom, R. J. (2013). Level set implementation for the simulation of anisotropic etching: Application to complex MEMS micromachining. Journal of Micromechanics & Microengineering, 23(7), 1. https://doi.org/10.1088/0960-1317/23/7/075017

Chicago Style (17th ed.) Citation

Montoliu, C., N. Ferrando, M. A. Gosálvez, J. Cerdá, and R. J. Colom. "Level Set Implementation for the Simulation of Anisotropic Etching: Application to Complex MEMS Micromachining." Journal of Micromechanics & Microengineering 23, no. 7 (2013): 1. https://doi.org/10.1088/0960-1317/23/7/075017.

MLA (9th ed.) Citation

Montoliu, C., et al. "Level Set Implementation for the Simulation of Anisotropic Etching: Application to Complex MEMS Micromachining." Journal of Micromechanics & Microengineering, vol. 23, no. 7, 2013, p. 1, https://doi.org/10.1088/0960-1317/23/7/075017.