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Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process.

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Title: Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process.
Authors: Wu Yu-Lin1, Deng Hui1, Yu Hai-Feng1, Xue Guang-Ming1, Tian Ye1, Li Jie1, Chen Ying-Fei1, Zhao Shi-Ping1, Zheng Dong-Ning1 dzheng@aphy.iphy.ac.cn
Source: Chinese Physics B. 2013, Vol. 22 Issue 6, p1-5. 5p.
Subjects: Josephson junctions, Quantum computing, Oxidation, Quantum mechanics, Electron beam lithography
Abstract: Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks: Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 µm² up to 1 µm². We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for super-conducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits. [ABSTRACT FROM AUTHOR]
Copyright of Chinese Physics B is the property of IOP Publishing and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 90176378
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Fabrication of Al/AlO<subscript>x</subscript>/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process.
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  Data: <searchLink fieldCode="AR" term="%22Wu+Yu-Lin%22">Wu Yu-Lin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Deng+Hui%22">Deng Hui</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Yu+Hai-Feng%22">Yu Hai-Feng</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Xue+Guang-Ming%22">Xue Guang-Ming</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Tian+Ye%22">Tian Ye</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Li+Jie%22">Li Jie</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Chen+Ying-Fei%22">Chen Ying-Fei</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Zhao+Shi-Ping%22">Zhao Shi-Ping</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Zheng+Dong-Ning%22">Zheng Dong-Ning</searchLink><relatesTo>1</relatesTo><i> dzheng@aphy.iphy.ac.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Chinese+Physics+B%22">Chinese Physics B</searchLink>. 2013, Vol. 22 Issue 6, p1-5. 5p.
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  Data: <searchLink fieldCode="DE" term="%22Josephson+junctions%22">Josephson junctions</searchLink><br /><searchLink fieldCode="DE" term="%22Quantum+computing%22">Quantum computing</searchLink><br /><searchLink fieldCode="DE" term="%22Oxidation%22">Oxidation</searchLink><br /><searchLink fieldCode="DE" term="%22Quantum+mechanics%22">Quantum mechanics</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+beam+lithography%22">Electron beam lithography</searchLink>
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  Data: Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks: Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 µm² up to 1 µm². We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for super-conducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
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  Data: <i>Copyright of Chinese Physics B is the property of IOP Publishing and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1088/1674-1056/22/6/060309
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      – Code: eng
        Text: English
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        PageCount: 5
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        Type: general
      – SubjectFull: Quantum computing
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      – SubjectFull: Oxidation
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      – SubjectFull: Quantum mechanics
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      – SubjectFull: Electron beam lithography
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      – TitleFull: Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process.
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            NameFull: Wu Yu-Lin
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              Text: 2013
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