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Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments.

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Title: Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments.
Authors: Borrielli, A. borrielli@fbk.eu, Bonaldi, M., Serra, E., Bagolini, A.1, Bellutti, P.1, Cataliotti, F., Marin, F., Marino, F., Pontin, A., Prodi, G., Pandraud, G.2, Sarro, P.2, Lorito, G.3, Zoumpoulidis, T.3
Source: Microsystem Technologies. Apr2014, Vol. 20 Issue 4/5, p907-917. 11p.
Subjects: Microresonators (Optoelectronics), Micromechanics, Quantum optics, Optomechanics, Ponderomotive force, Radiation pressure, Silicon, Thermal properties
Abstract: The interaction of the radiation pressure with micro-mechanical oscillators is earning a growing interest for its wide-range applications and for fundamental research. In this contribution we describe the fabrication of a family of opto-mechanical devices specifically designed to ease the detection of ponderomotive squeezing and of entanglement between macroscopic objects and light. These phenomena are not easily observed, due to the overwhelming effects of classical noise sources of thermal origin with respect to the weak quantum fluctuations of the radiation pressure. A low thermal noise background is required, together with a weak interaction between the micro-mirror and this background (i.e. high mechanical quality factors). In the development of our opto-mechanical devices, we heve explored an approach focused on relatively thick silicon oscillators with high reflectivity coating. The relatively high mass is compensated by the capability to manage high power at low temperatures, owing to a favourable geometric factor (thicker connectors) and the excellent thermal conductivity of silicon crystals at cryogenic temperature. We have measured at cryogenic temperatures mechanical quality factors up to 10 in a micro-oscillator designed to reduce as much as possible the strain in the coating layer and the consequent energy dissipation. This design improves an approach applied in micro-mirror and micro-cantilevers, where the coated surface is reduced as much as possible to improve the quality factor. The deposition of the highly reflective coating layer has been carefully integrated in the micro-machining process to preserve its low optical losses. [ABSTRACT FROM AUTHOR]
Copyright of Microsystem Technologies is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments.
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  Data: <searchLink fieldCode="AR" term="%22Borrielli%2C+A%2E%22">Borrielli, A.</searchLink><i> borrielli@fbk.eu</i><br /><searchLink fieldCode="AR" term="%22Bonaldi%2C+M%2E%22">Bonaldi, M.</searchLink><br /><searchLink fieldCode="AR" term="%22Serra%2C+E%2E%22">Serra, E.</searchLink><br /><searchLink fieldCode="AR" term="%22Bagolini%2C+A%2E%22">Bagolini, A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Bellutti%2C+P%2E%22">Bellutti, P.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Cataliotti%2C+F%2E%22">Cataliotti, F.</searchLink><br /><searchLink fieldCode="AR" term="%22Marin%2C+F%2E%22">Marin, F.</searchLink><br /><searchLink fieldCode="AR" term="%22Marino%2C+F%2E%22">Marino, F.</searchLink><br /><searchLink fieldCode="AR" term="%22Pontin%2C+A%2E%22">Pontin, A.</searchLink><br /><searchLink fieldCode="AR" term="%22Prodi%2C+G%2E%22">Prodi, G.</searchLink><br /><searchLink fieldCode="AR" term="%22Pandraud%2C+G%2E%22">Pandraud, G.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Sarro%2C+P%2E%22">Sarro, P.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Lorito%2C+G%2E%22">Lorito, G.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Zoumpoulidis%2C+T%2E%22">Zoumpoulidis, T.</searchLink><relatesTo>3</relatesTo>
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  Data: The interaction of the radiation pressure with micro-mechanical oscillators is earning a growing interest for its wide-range applications and for fundamental research. In this contribution we describe the fabrication of a family of opto-mechanical devices specifically designed to ease the detection of ponderomotive squeezing and of entanglement between macroscopic objects and light. These phenomena are not easily observed, due to the overwhelming effects of classical noise sources of thermal origin with respect to the weak quantum fluctuations of the radiation pressure. A low thermal noise background is required, together with a weak interaction between the micro-mirror and this background (i.e. high mechanical quality factors). In the development of our opto-mechanical devices, we heve explored an approach focused on relatively thick silicon oscillators with high reflectivity coating. The relatively high mass is compensated by the capability to manage high power at low temperatures, owing to a favourable geometric factor (thicker connectors) and the excellent thermal conductivity of silicon crystals at cryogenic temperature. We have measured at cryogenic temperatures mechanical quality factors up to 10 in a micro-oscillator designed to reduce as much as possible the strain in the coating layer and the consequent energy dissipation. This design improves an approach applied in micro-mirror and micro-cantilevers, where the coated surface is reduced as much as possible to improve the quality factor. The deposition of the highly reflective coating layer has been carefully integrated in the micro-machining process to preserve its low optical losses. [ABSTRACT FROM AUTHOR]
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  Data: <i>Copyright of Microsystem Technologies is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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