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Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometry.

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Title: Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometry.
Authors: Kregar, Z.1 zkregar@ifs.hr, Zaplotnik, R.1,2, Mozetič, M.2, Milošević, S.1
Source: Vacuum. Nov2014, Vol. 109, p8-14. 7p.
Subjects: Comparative studies, Spatial distribution (Quantum optics), Oxygen, Hydrogen, Intracranial hypertension, Inductively coupled plasma spectrometry
Abstract: Low pressure inductively coupled plasma was investigated with a combination of two diagnostic techniques: catalytic probes and optical emission spectroscopy (actinometry). Three working gases were used: oxygen, oxygen–argon mixture and hydrogen. Concentrations of oxygen and hydrogen atoms were determined in a wide range of plasma parameters, with pressure ranging from 10 Pa to 70 Pa, applied power in the range from 50 to 250 W and at many different positions throughout the system (including the coil and afterglow in sample chamber). Concentrations of oxygen atoms were measured to be 1.3 × 10 15 cm −3 in the middle of the coil and 4 × 10 12 cm −3 in the regions of the chamber furthest from the coil. These spatially resolved concentrations are very important in plasma processing of materials, because radical concentrations over the sample determine plasma–material interactions. This work demonstrates that a relatively simple detection system can be practical and sufficiently successful in many plasma applications. [ABSTRACT FROM AUTHOR]
Copyright of Vacuum is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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DbLabel: Engineering Source
An: 98140313
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  Data: Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometry.
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  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>. Nov2014, Vol. 109, p8-14. 7p.
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  Data: <searchLink fieldCode="DE" term="%22Comparative+studies%22">Comparative studies</searchLink><br /><searchLink fieldCode="DE" term="%22Spatial+distribution+%28Quantum+optics%29%22">Spatial distribution (Quantum optics)</searchLink><br /><searchLink fieldCode="DE" term="%22Oxygen%22">Oxygen</searchLink><br /><searchLink fieldCode="DE" term="%22Hydrogen%22">Hydrogen</searchLink><br /><searchLink fieldCode="DE" term="%22Intracranial+hypertension%22">Intracranial hypertension</searchLink><br /><searchLink fieldCode="DE" term="%22Inductively+coupled+plasma+spectrometry%22">Inductively coupled plasma spectrometry</searchLink>
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  Data: Low pressure inductively coupled plasma was investigated with a combination of two diagnostic techniques: catalytic probes and optical emission spectroscopy (actinometry). Three working gases were used: oxygen, oxygen–argon mixture and hydrogen. Concentrations of oxygen and hydrogen atoms were determined in a wide range of plasma parameters, with pressure ranging from 10 Pa to 70 Pa, applied power in the range from 50 to 250 W and at many different positions throughout the system (including the coil and afterglow in sample chamber). Concentrations of oxygen atoms were measured to be 1.3 × 10 15 cm −3 in the middle of the coil and 4 × 10 12 cm −3 in the regions of the chamber furthest from the coil. These spatially resolved concentrations are very important in plasma processing of materials, because radical concentrations over the sample determine plasma–material interactions. This work demonstrates that a relatively simple detection system can be practical and sufficiently successful in many plasma applications. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Vacuum is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.vacuum.2014.06.010
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        Text: English
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        PageCount: 7
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        Type: general
      – SubjectFull: Spatial distribution (Quantum optics)
        Type: general
      – SubjectFull: Oxygen
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      – SubjectFull: Hydrogen
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      – SubjectFull: Intracranial hypertension
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      – SubjectFull: Inductively coupled plasma spectrometry
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      – TitleFull: Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometry.
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              Text: Nov2014
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