Etching of glass microchips with supercritical water.
Saved in:
| Title: | Etching of glass microchips with supercritical water. |
|---|---|
| Authors: | Karásek, Pavel1 karasek@iach.cz, Grym, Jakub1, Roth, Michal1, Planeta, Josef1, Foret, František1 foret@iach.cz |
| Source: | Lab on a Chip. 2015, Vol. 15 Issue 1, p311-318. 8p. |
| Subjects: | Glass etching, Supercritical water, Labs on a chip, Hydrogen fluoride, Microchannel flow |
| Abstract: | A novel method of etching channels in glass microchips with the most tunable solvent, water, was tested as an alternative to common hydrogen fluoride-containing etchants. The etching properties of water strongly depend on temperature and pressure, especially in the vicinity of the water critical point. The chips were etched at the subcritical, supercritical and critical temperature of water, and the resulting channel shape, width, depth and surface morphology were studied by scanning electron microscopy and 3D laser profilometry. Channels etched with the hot water were compared with the chips etched with standard hydrogen fluoride-containing solution. Depending on the water pressure and temperature, the silicate dissolved from the glass could be re-deposited on the channel surface. This interesting phenomenon is described together with the conditions necessary for its utilization. The results illustrate the versatility of pure water as a glass etching and surface morphing agent. [ABSTRACT FROM AUTHOR] |
| Copyright of Lab on a Chip is the property of Royal Society of Chemistry and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
|---|---|
| Header | DbId: egs DbLabel: Engineering Source An: 99813818 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
| IllustrationInfo | |
| Items | – Name: Title Label: Title Group: Ti Data: Etching of glass microchips with supercritical water. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Karásek%2C+Pavel%22">Karásek, Pavel</searchLink><relatesTo>1</relatesTo><i> karasek@iach.cz</i><br /><searchLink fieldCode="AR" term="%22Grym%2C+Jakub%22">Grym, Jakub</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Roth%2C+Michal%22">Roth, Michal</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Planeta%2C+Josef%22">Planeta, Josef</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Foret%2C+František%22">Foret, František</searchLink><relatesTo>1</relatesTo><i> foret@iach.cz</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Lab+on+a+Chip%22">Lab on a Chip</searchLink>. 2015, Vol. 15 Issue 1, p311-318. 8p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Glass+etching%22">Glass etching</searchLink><br /><searchLink fieldCode="DE" term="%22Supercritical+water%22">Supercritical water</searchLink><br /><searchLink fieldCode="DE" term="%22Labs+on+a+chip%22">Labs on a chip</searchLink><br /><searchLink fieldCode="DE" term="%22Hydrogen+fluoride%22">Hydrogen fluoride</searchLink><br /><searchLink fieldCode="DE" term="%22Microchannel+flow%22">Microchannel flow</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: A novel method of etching channels in glass microchips with the most tunable solvent, water, was tested as an alternative to common hydrogen fluoride-containing etchants. The etching properties of water strongly depend on temperature and pressure, especially in the vicinity of the water critical point. The chips were etched at the subcritical, supercritical and critical temperature of water, and the resulting channel shape, width, depth and surface morphology were studied by scanning electron microscopy and 3D laser profilometry. Channels etched with the hot water were compared with the chips etched with standard hydrogen fluoride-containing solution. Depending on the water pressure and temperature, the silicate dissolved from the glass could be re-deposited on the channel surface. This interesting phenomenon is described together with the conditions necessary for its utilization. The results illustrate the versatility of pure water as a glass etching and surface morphing agent. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Lab on a Chip is the property of Royal Society of Chemistry and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=99813818 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1039/c4lc00843j Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: 311 Subjects: – SubjectFull: Glass etching Type: general – SubjectFull: Supercritical water Type: general – SubjectFull: Labs on a chip Type: general – SubjectFull: Hydrogen fluoride Type: general – SubjectFull: Microchannel flow Type: general Titles: – TitleFull: Etching of glass microchips with supercritical water. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Karásek, Pavel – PersonEntity: Name: NameFull: Grym, Jakub – PersonEntity: Name: NameFull: Roth, Michal – PersonEntity: Name: NameFull: Planeta, Josef – PersonEntity: Name: NameFull: Foret, František IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 01 Text: 2015 Type: published Y: 2015 Identifiers: – Type: issn-print Value: 14730197 Numbering: – Type: volume Value: 15 – Type: issue Value: 1 Titles: – TitleFull: Lab on a Chip Type: main |
| ResultId | 1 |
