APA (7th ed.) Citation

XD, P., CP, B., & PG, C. (2003). Fluorine in silicon: Diffusion, trapping, and precipitation. Physical review letters, 90(15), 155901. https://doi.org/10.1103/PhysRevLett.90.155901

Chicago Style (17th ed.) Citation

XD, Pi, Burrows CP, and Coleman PG. "Fluorine in Silicon: Diffusion, Trapping, and Precipitation." Physical Review Letters 90, no. 15 (2003): 155901. https://doi.org/10.1103/PhysRevLett.90.155901.

MLA (9th ed.) Citation

XD, Pi, et al. "Fluorine in Silicon: Diffusion, Trapping, and Precipitation." Physical Review Letters, vol. 90, no. 15, 2003, p. 155901, https://doi.org/10.1103/PhysRevLett.90.155901.