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Fluorine in silicon: diffusion, trapping, and precipitation.

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Bibliographic Details
Title: Fluorine in silicon: diffusion, trapping, and precipitation.
Authors: Pi XD; Department of Physics, University of Bath, Bath BA2 7AY, United Kingdom., Burrows CP, Coleman PG
Source: Physical review letters [Phys Rev Lett] 2003 Apr 18; Vol. 90 (15), pp. 155901. Date of Electronic Publication: 2003 Apr 17.
Publication Type: Journal Article
Journal Info: Publisher: American Physical Society Country of Publication: United States NLM ID: 0401141 Publication Model: Print-Electronic Cited Medium: Print ISSN: 0031-9007 (Print) Linking ISSN: 00319007 NLM ISO Abbreviation: Phys Rev Lett Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Fluorine in silicon: diffusion, trapping, and precipitation.
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  Data: <searchLink fieldCode="AU" term="%22Pi+XD%22">Pi XD</searchLink>; Department of Physics, University of Bath, Bath BA2 7AY, United Kingdom.<br /><searchLink fieldCode="AU" term="%22Burrows+CP%22">Burrows CP</searchLink><br /><searchLink fieldCode="AU" term="%22Coleman+PG%22">Coleman PG</searchLink>
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  Data: <searchLink fieldCode="JN" term="%220401141%22">Physical review letters</searchLink> [Phys Rev Lett] 2003 Apr 18; Vol. 90 (15), pp. 155901. <i>Date of Electronic Publication: </i>2003 Apr 17.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22American+Physical+Society%22">American Physical Society </searchLink><i>Country of Publication: </i>United States <i>NLM ID: </i>0401141 <i>Publication Model: </i>Print-Electronic <i>Cited Medium: </i>Print <i>ISSN: </i>0031-9007 (Print) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2200319007%22">00319007 </searchLink><i>NLM ISO Abbreviation: </i>Phys Rev Lett <i>Subsets: </i>PubMed not MEDLINE
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      – Type: doi
        Value: 10.1103/PhysRevLett.90.155901
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      – Code: eng
        Text: English
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        StartPage: 155901
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      – TitleFull: Fluorine in silicon: diffusion, trapping, and precipitation.
        Type: main
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            NameFull: Pi XD
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            NameFull: Burrows CP
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            NameFull: Coleman PG
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            – D: 18
              M: 04
              Text: 2003 Apr 18
              Type: published
              Y: 2003
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              Value: 90
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              Value: 15
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            – TitleFull: Physical review letters
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