Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures. - Wenisch R; Lungwitz F; Hanf D; Heller R; Zscharschuch J; Hübner R; von Borany J; Abrasonis G; Gemming S; Escobar-Galindo R; Krause M (Analytical chemistry, 2018)