Impact of the Atomic Layer-Deposited Ru Electrode Surface Morphology on Resistive Switching Properties of TaOx-Based Memory Structures.
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| Title: | Impact of the Atomic Layer-Deposited Ru Electrode Surface Morphology on Resistive Switching Properties of TaO |
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| Authors: | Koroleva AA; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation., Chernikova AG; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation., Chouprik AA; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation., Gornev ES; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation.; Molecular Electronics Research Institute, 12/1 Akademika Valieva Street, Zelenograd, Moscow 124460, Russian Federation., Slavich AS; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation., Khakimov RR; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation., Korostylev EV; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation., Hwang CS; Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 08826, South Korea., Markeev AM; Moscow Institute of Physics and Technology, Institutskii Lane 9, Dolgoprudny 141700, Russian Federation. |
| Source: | ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2020 Dec 09; Vol. 12 (49), pp. 55331-55341. Date of Electronic Publication: 2020 Nov 15. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: American Chemical Society Country of Publication: United States NLM ID: 101504991 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1944-8252 (Electronic) Linking ISSN: 19448244 NLM ISO Abbreviation: ACS Appl Mater Interfaces Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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