View in EDS

Crystalline defect analysis in epitaxial Si0.7Ge0.3 layer using site-specific ECCI-STEM.

Saved in:
Bibliographic Details
Title: Crystalline defect analysis in epitaxial Si0.7Ge0.3 layer using site-specific ECCI-STEM.
Authors: Han H; imec, Kapeldreef 75, 3001, Leuven, Belgium. Electronic address: han.han@imec.be., Strakos L; Thermo Fisher Scientific, Vlastimila Pecha 12, 62700, Brno, Czech Republic., Hantschel T; imec, Kapeldreef 75, 3001, Leuven, Belgium., Porret C; imec, Kapeldreef 75, 3001, Leuven, Belgium., Vystavel T; Thermo Fisher Scientific, Vlastimila Pecha 12, 62700, Brno, Czech Republic., Loo R; imec, Kapeldreef 75, 3001, Leuven, Belgium., Caymax M; imec, Kapeldreef 75, 3001, Leuven, Belgium.
Source: Micron (Oxford, England : 1993) [Micron] 2021 Nov; Vol. 150, pp. 103123. Date of Electronic Publication: 2021 Jul 21.
Publication Type: Journal Article
Journal Info: Publisher: Pergamon Press Country of Publication: England NLM ID: 9312850 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1878-4291 (Electronic) Linking ISSN: 09684328 NLM ISO Abbreviation: Micron Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
FullText Text:
  Availability: 0
Header DbId: mdl
DbLabel: MEDLINE Ultimate
An: 34343885
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Crystalline defect analysis in epitaxial Si<subscript>0.7</subscript>Ge<subscript>0.3</subscript> layer using site-specific ECCI-STEM.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Han+H%22">Han H</searchLink>; imec, Kapeldreef 75, 3001, Leuven, Belgium. Electronic address: han.han@imec.be.<br /><searchLink fieldCode="AU" term="%22Strakos+L%22">Strakos L</searchLink>; Thermo Fisher Scientific, Vlastimila Pecha 12, 62700, Brno, Czech Republic.<br /><searchLink fieldCode="AU" term="%22Hantschel+T%22">Hantschel T</searchLink>; imec, Kapeldreef 75, 3001, Leuven, Belgium.<br /><searchLink fieldCode="AU" term="%22Porret+C%22">Porret C</searchLink>; imec, Kapeldreef 75, 3001, Leuven, Belgium.<br /><searchLink fieldCode="AU" term="%22Vystavel+T%22">Vystavel T</searchLink>; Thermo Fisher Scientific, Vlastimila Pecha 12, 62700, Brno, Czech Republic.<br /><searchLink fieldCode="AU" term="%22Loo+R%22">Loo R</searchLink>; imec, Kapeldreef 75, 3001, Leuven, Belgium.<br /><searchLink fieldCode="AU" term="%22Caymax+M%22">Caymax M</searchLink>; imec, Kapeldreef 75, 3001, Leuven, Belgium.
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%229312850%22">Micron (Oxford, England : 1993)</searchLink> [Micron] 2021 Nov; Vol. 150, pp. 103123. <i>Date of Electronic Publication: </i>2021 Jul 21.
– Name: TypePub
  Label: Publication Type
  Group: TypPub
  Data: Journal Article
– Name: TitleSource
  Label: Journal Info
  Group: Src
  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22Pergamon+Press%22">Pergamon Press </searchLink><i>Country of Publication: </i>England <i>NLM ID: </i>9312850 <i>Publication Model: </i>Print-Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>1878-4291 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2209684328%22">09684328 </searchLink><i>NLM ISO Abbreviation: </i>Micron <i>Subsets: </i>MEDLINE; PubMed not MEDLINE
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=mdl&AN=34343885
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.micron.2021.103123
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        StartPage: 103123
    Titles:
      – TitleFull: Crystalline defect analysis in epitaxial Si0.7Ge0.3 layer using site-specific ECCI-STEM.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Han H
      – PersonEntity:
          Name:
            NameFull: Strakos L
      – PersonEntity:
          Name:
            NameFull: Hantschel T
      – PersonEntity:
          Name:
            NameFull: Porret C
      – PersonEntity:
          Name:
            NameFull: Vystavel T
      – PersonEntity:
          Name:
            NameFull: Loo R
      – PersonEntity:
          Name:
            NameFull: Caymax M
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 11
              Text: 2021 Nov
              Type: published
              Y: 2021
          Identifiers:
            – Type: issn-electronic
              Value: 1878-4291
          Numbering:
            – Type: volume
              Value: 150
          Titles:
            – TitleFull: Micron (Oxford, England : 1993)
              Type: main
ResultId 1