Short-Pulse Laser-Assisted Fabrication of a Si-SiO2 Microcooling Device.
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| Title: | Short-Pulse Laser-Assisted Fabrication of a Si-SiO |
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| Authors: | Mouskeftaras A; Aix Marseille University, CNRS, LP3, UMR7341, 13284 Marseille, France., Beurthey S; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France., Cogan J; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France., Hallewell G; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France., Leroy O; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France., Grojo D; Aix Marseille University, CNRS, LP3, UMR7341, 13284 Marseille, France., Perrin-Terrin M; Aix Marseille University, CNRS/IN2P3, CPPM, Marseille, France. |
| Source: | Micromachines [Micromachines (Basel)] 2021 Aug 30; Vol. 12 (9). Date of Electronic Publication: 2021 Aug 30. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 2072-666X |
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| DOI: | 10.3390/mi12091054 |
