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Data on nitridation effect of AlTiTaZrHf(-N) high entropy films by X-ray photoelectron spectroscopy.

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Title: Data on nitridation effect of AlTiTaZrHf(-N) high entropy films by X-ray photoelectron spectroscopy.
Authors: El Garah M; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France., Touaibia DE; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France., Achache S; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France., Michau A; Commissariat à l'Energie Atomique et aux Énergies Alternatives (CEA) Saclay, Gif-sur Yvette 91191, France., Sviridova E; Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, Tomsk 634050, Russia., Postnikov PS; Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, Tomsk 634050, Russia., Chehimi MM; ITODYS, CNRS, UMR 7086, Université de Paris,15 rue JA de Baïf, Paris 75013, France., Schuster F; Commissariat à l'Energie Atomique et aux Énergies Alternatives (CEA) Saclay, Gif-sur Yvette 91191, France., Sanchette F; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France.
Source: Data in brief [Data Brief] 2022 May 06; Vol. 42, pp. 108241. Date of Electronic Publication: 2022 May 06 (Print Publication: 2022).
Publication Type: Journal Article
Journal Info: Publisher: Elsevier B.V Country of Publication: Netherlands NLM ID: 101654995 Publication Model: eCollection Cited Medium: Internet ISSN: 2352-3409 (Electronic) Linking ISSN: 23523409 NLM ISO Abbreviation: Data Brief Subsets: PubMed not MEDLINE
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  Data: Data on nitridation effect of AlTiTaZrHf(-N) high entropy films by X-ray photoelectron spectroscopy.
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  Data: <searchLink fieldCode="AU" term="%22El+Garah+M%22">El Garah M</searchLink>; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France.<br /><searchLink fieldCode="AU" term="%22Touaibia+DE%22">Touaibia DE</searchLink>; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France.<br /><searchLink fieldCode="AU" term="%22Achache+S%22">Achache S</searchLink>; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France.<br /><searchLink fieldCode="AU" term="%22Michau+A%22">Michau A</searchLink>; Commissariat à l'Energie Atomique et aux Énergies Alternatives (CEA) Saclay, Gif-sur Yvette 91191, France.<br /><searchLink fieldCode="AU" term="%22Sviridova+E%22">Sviridova E</searchLink>; Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, Tomsk 634050, Russia.<br /><searchLink fieldCode="AU" term="%22Postnikov+PS%22">Postnikov PS</searchLink>; Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, Tomsk 634050, Russia.<br /><searchLink fieldCode="AU" term="%22Chehimi+MM%22">Chehimi MM</searchLink>; ITODYS, CNRS, UMR 7086, Université de Paris,15 rue JA de Baïf, Paris 75013, France.<br /><searchLink fieldCode="AU" term="%22Schuster+F%22">Schuster F</searchLink>; Commissariat à l'Energie Atomique et aux Énergies Alternatives (CEA) Saclay, Gif-sur Yvette 91191, France.<br /><searchLink fieldCode="AU" term="%22Sanchette+F%22">Sanchette F</searchLink>; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France.
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  Data: <searchLink fieldCode="JN" term="%22101654995%22">Data in brief</searchLink> [Data Brief] 2022 May 06; Vol. 42, pp. 108241. <i>Date of Electronic Publication: </i>2022 May 06 (<i>Print Publication: </i>2022).
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