Data on nitridation effect of AlTiTaZrHf(-N) high entropy films by X-ray photoelectron spectroscopy.
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| Title: | Data on nitridation effect of AlTiTaZrHf(-N) high entropy films by X-ray photoelectron spectroscopy. |
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| Authors: | El Garah M; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France., Touaibia DE; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France., Achache S; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France., Michau A; Commissariat à l'Energie Atomique et aux Énergies Alternatives (CEA) Saclay, Gif-sur Yvette 91191, France., Sviridova E; Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, Tomsk 634050, Russia., Postnikov PS; Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, Tomsk 634050, Russia., Chehimi MM; ITODYS, CNRS, UMR 7086, Université de Paris,15 rue JA de Baïf, Paris 75013, France., Schuster F; Commissariat à l'Energie Atomique et aux Énergies Alternatives (CEA) Saclay, Gif-sur Yvette 91191, France., Sanchette F; LASMIS, Pôle Technologique de Sud - Champagne, Antenne de Nogent - 52, Nogent 52800, France.; Nogent International Center for CVD Innovation (NICCI), LRC CEA-LASMIS, Pôle Technologique de Sud - Champagne, Nogent 52800 , France. |
| Source: | Data in brief [Data Brief] 2022 May 06; Vol. 42, pp. 108241. Date of Electronic Publication: 2022 May 06 (Print Publication: 2022). |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: Elsevier B.V Country of Publication: Netherlands NLM ID: 101654995 Publication Model: eCollection Cited Medium: Internet ISSN: 2352-3409 (Electronic) Linking ISSN: 23523409 NLM ISO Abbreviation: Data Brief Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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