On the Reliability of HZO-Based Ferroelectric Capacitors: The Cases of Ru and TiN Electrodes.
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| Title: | On the Reliability of HZO-Based Ferroelectric Capacitors: The Cases of Ru and TiN Electrodes. |
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| Authors: | Khakimov RR; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia., Chernikova AG; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia., Koroleva AA; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia., Markeev AM; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia. |
| Source: | Nanomaterials (Basel, Switzerland) [Nanomaterials (Basel)] 2022 Sep 03; Vol. 12 (17). Date of Electronic Publication: 2022 Sep 03. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI AG Country of Publication: Switzerland NLM ID: 101610216 Publication Model: Electronic Cited Medium: Print ISSN: 2079-4991 (Print) Linking ISSN: 20794991 NLM ISO Abbreviation: Nanomaterials (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| Header | DbId: mdl DbLabel: MEDLINE Ultimate An: 36080096 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: On the Reliability of HZO-Based Ferroelectric Capacitors: The Cases of Ru and TiN Electrodes. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Khakimov+RR%22">Khakimov RR</searchLink>; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia.<br /><searchLink fieldCode="AU" term="%22Chernikova+AG%22">Chernikova AG</searchLink>; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia.<br /><searchLink fieldCode="AU" term="%22Koroleva+AA%22">Koroleva AA</searchLink>; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia.<br /><searchLink fieldCode="AU" term="%22Markeev+AM%22">Markeev AM</searchLink>; Moscow Institute of Physics and Technology, Institutskii per. 9, 141700 Dolgoprudny, Russia. – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22101610216%22">Nanomaterials (Basel, Switzerland)</searchLink> [Nanomaterials (Basel)] 2022 Sep 03; Vol. 12 (17). <i>Date of Electronic Publication: </i>2022 Sep 03. – Name: TypePub Label: Publication Type Group: TypPub Data: Journal Article – Name: TitleSource Label: Journal Info Group: Src Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22MDPI+AG%22">MDPI AG </searchLink><i>Country of Publication: </i>Switzerland <i>NLM ID: </i>101610216 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Print <i>ISSN: </i>2079-4991 (Print) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2220794991%22">20794991 </searchLink><i>NLM ISO Abbreviation: </i>Nanomaterials (Basel) <i>Subsets: </i>PubMed not MEDLINE |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=mdl&AN=36080096 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.3390/nano12173059 Languages: – Code: eng Text: English Titles: – TitleFull: On the Reliability of HZO-Based Ferroelectric Capacitors: The Cases of Ru and TiN Electrodes. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Khakimov RR – PersonEntity: Name: NameFull: Chernikova AG – PersonEntity: Name: NameFull: Koroleva AA – PersonEntity: Name: NameFull: Markeev AM IsPartOfRelationships: – BibEntity: Dates: – D: 03 M: 09 Text: 2022 Sep 03 Type: published Y: 2022 Identifiers: – Type: issn-print Value: 2079-4991 Numbering: – Type: volume Value: 12 – Type: issue Value: 17 Titles: – TitleFull: Nanomaterials (Basel, Switzerland) Type: main |
| ResultId | 1 |
