Investigation of Inkjet-Printed Masks for Fast and Easy Photolithographic NIL Masters Manufacturing.
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| Title: | Investigation of Inkjet-Printed Masks for Fast and Easy Photolithographic NIL Masters Manufacturing. |
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| Authors: | Burkert S; Center of Optical Technologies, Aalen University, 73430 Aalen, Germany., Eder C; Center of Optical Technologies, Aalen University, 73430 Aalen, Germany., Heinrich A; Center of Optical Technologies, Aalen University, 73430 Aalen, Germany. |
| Source: | Micromachines [Micromachines (Basel)] 2023 Jul 29; Vol. 14 (8). Date of Electronic Publication: 2023 Jul 29. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 2072-666X |
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| DOI: | 10.3390/mi14081524 |
