Water Vapor-Impermeable AlON/HfOx Bilayer Films Deposited by Hybrid High-Power Impulse Magnetron Sputtering/Radio-Frequency Magnetron Sputtering Processes.
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| Title: | Water Vapor-Impermeable AlON/HfO |
|---|---|
| Authors: | Chang LC; Department of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan.; Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, Taiwan., Lin SE; Department of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan. |
| Source: | Materials (Basel, Switzerland) [Materials (Basel)] 2024 Nov 08; Vol. 17 (22). Date of Electronic Publication: 2024 Nov 08. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101555929 Publication Model: Electronic Cited Medium: Print ISSN: 1996-1944 (Print) Linking ISSN: 19961944 NLM ISO Abbreviation: Materials (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| FullText | Links: – Type: pdflink Text: Availability: 1 |
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| Header | DbId: mdl DbLabel: MEDLINE Ultimate An: 39597277 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Water Vapor-Impermeable AlON/HfO<subscript>x</subscript> Bilayer Films Deposited by Hybrid High-Power Impulse Magnetron Sputtering/Radio-Frequency Magnetron Sputtering Processes. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Chang+LC%22">Chang LC</searchLink>; Department of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan.; Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, Taiwan.<br /><searchLink fieldCode="AU" term="%22Lin+SE%22">Lin SE</searchLink>; Department of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan. – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22101555929%22">Materials (Basel, Switzerland)</searchLink> [Materials (Basel)] 2024 Nov 08; Vol. 17 (22). <i>Date of Electronic Publication: </i>2024 Nov 08. – Name: TypePub Label: Publication Type Group: TypPub Data: Journal Article – Name: TitleSource Label: Journal Info Group: Src Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22MDPI%22">MDPI </searchLink><i>Country of Publication: </i>Switzerland <i>NLM ID: </i>101555929 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Print <i>ISSN: </i>1996-1944 (Print) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2219961944%22">19961944 </searchLink><i>NLM ISO Abbreviation: </i>Materials (Basel) <i>Subsets: </i>PubMed not MEDLINE |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=mdl&AN=39597277 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.3390/ma17225453 Languages: – Code: eng Text: English Titles: – TitleFull: Water Vapor-Impermeable AlON/HfOx Bilayer Films Deposited by Hybrid High-Power Impulse Magnetron Sputtering/Radio-Frequency Magnetron Sputtering Processes. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Chang LC – PersonEntity: Name: NameFull: Lin SE IsPartOfRelationships: – BibEntity: Dates: – D: 08 M: 11 Text: 2024 Nov 08 Type: published Y: 2024 Identifiers: – Type: issn-print Value: 1996-1944 Numbering: – Type: volume Value: 17 – Type: issue Value: 22 Titles: – TitleFull: Materials (Basel, Switzerland) Type: main |
| ResultId | 1 |
