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Demonstration of NiCo as an Alternative Metal for Post-Cu Interconnects.

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Title: Demonstration of NiCo as an Alternative Metal for Post-Cu Interconnects.
Authors: Sung JY; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Jo GY; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Moon SM; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lee CH; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lim Y; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Yun Y; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lee SH; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea., Lee JY; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Yang DJ; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Kim SW; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea., Lee SW; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.
Source: ACS nano [ACS Nano] 2025 Feb 25; Vol. 19 (7), pp. 7253-7262. Date of Electronic Publication: 2025 Feb 12.
Publication Type: Journal Article
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 101313589 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1936-086X (Electronic) Linking ISSN: 19360851 NLM ISO Abbreviation: ACS Nano Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Demonstration of NiCo as an Alternative Metal for Post-Cu Interconnects.
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  Data: <searchLink fieldCode="AU" term="%22Sung+JY%22">Sung JY</searchLink>; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Jo+GY%22">Jo GY</searchLink>; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Moon+SM%22">Moon SM</searchLink>; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Lee+CH%22">Lee CH</searchLink>; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Lim+Y%22">Lim Y</searchLink>; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Yun+Y%22">Yun Y</searchLink>; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Lee+SH%22">Lee SH</searchLink>; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Lee+JY%22">Lee JY</searchLink>; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Yang+DJ%22">Yang DJ</searchLink>; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Kim+SW%22">Kim SW</searchLink>; Device Research Center, Samsung Advanced Institute of Technology, Suwon 16678, Republic of Korea.<br /><searchLink fieldCode="AU" term="%22Lee+SW%22">Lee SW</searchLink>; Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do 16499, Republic of Korea.
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  Data: <searchLink fieldCode="JN" term="%22101313589%22">ACS nano</searchLink> [ACS Nano] 2025 Feb 25; Vol. 19 (7), pp. 7253-7262. <i>Date of Electronic Publication: </i>2025 Feb 12.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22American+Chemical+Society%22">American Chemical Society </searchLink><i>Country of Publication: </i>United States <i>NLM ID: </i>101313589 <i>Publication Model: </i>Print-Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>1936-086X (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2219360851%22">19360851 </searchLink><i>NLM ISO Abbreviation: </i>ACS Nano <i>Subsets: </i>MEDLINE; PubMed not MEDLINE
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        Value: 10.1021/acsnano.4c17216
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              Text: 2025 Feb 25
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