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Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing.

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Title: Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing.
Authors: Gokhale D; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States., Cerrón-Calle GA; School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, Arizona 85287, United States., Kim-Fu ML; Department of Chemistry, Oregon State University, Corvallis, Oregon 97331, United States., Flores K; School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, Arizona 85287, United States., Román Santiago A; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States., Tsai SW; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States., Aga DS; Department of Chemistry, University at Buffalo, The State University of New York, Buffalo, New York 14260, United States., Aich N; Department of Civil and Environmental Engineering, University of Nebraska - Lincoln, Lincoln, Nebraska 68588, Unites States., Diallo MS; Division of Engineering and Applied Science, California Institute of Technology, Pasadena, California 91125, United States., Doudrick K; Department of Civil and Environmental Engineering and Earth Sciences, University of Notre Dame, Notre Dame, Indiana 46556, United States., Hanigan D; Department of Civil and Environmental Engineering, University of Nevada Reno, Reno, Nevada 89557, United States., Hernández Sánchez R; Department of Chemistry, Rice University, Houston, Texas 77005, United States.; Rice Advanced Materials Institute, Rice University, Houston, Texas 77005, United States.; Rice Sustainability Institute, Rice University, Houston, Texas 77005, United States.; Rice WaTER Institute, Rice University, Houston, Texas 77005, United States., Howarter J; School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States.; School of Sustainability Engineering and Environmental Engineering, Purdue University, West Lafayette, Indiana 47907, United States., Jiang JJ; Department of Chemistry, University of Cincinnati, Cincinnati, Ohio 45221, United States., Jones GD; Department of Biological and Ecological Engineering, Oregon State University, Corvallis, Oregon 97331, United States., Lee LS; School of Sustainability Engineering and Environmental Engineering, Purdue University, West Lafayette, Indiana 47907, United States.; School of Agronomy, Purdue University, West Lafayette, Indiana 47907, United States., Liu H; Department of Chemical and Environmental Engineering, University of California, Riverside, California 92521, United States., Manz KE; Department of Environmental Health Sciences, University of Michigan, Ann Arbor, Michigan 48109, United States., McKenzie ER; Department of Civil and Environmental Engineering, Temple University, Philadelphia, Pennsylvania 19122, United States., Padhye LP; The New York State Center for Clean Water Technology, Stony Brook University, Stony Brook, New York 11794, United States.; Department of Civil and Environmental Engineering, The University of Auckland, Auckland 1142, New Zealand., Sankaran RM; Department of Nuclear, Plasma, and Radiological Engineering, The Grainger College of Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States., Shepard SM; CHIPS R&D Office, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States., Strathmann TJ; Department of Civil and Environmental Engineering, Colorado School of Mines, Golden, Colorado 80401, United States., Venkatesan AK; Department of Civil and Environmental Engineering, New Jersey Institute of Technology, Newark, New Jersey 07102, United States., Wong MS; Department of Chemical and Biomolecular Engineering, Rice University, Houston, Texas 77005, United States., Leet R; Leet Environmental Consulting, Portland, Oregon 97219, United States., Speed D; GlobalFoundries, Inc., Malta, New York 12020, United States., Field JA; Department of Environmental and Molecular Toxicology, Oregon State University, Corvallis, Oregon 97331, United States., Westerhoff P; School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, Arizona 85287, United States., Su X; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.
Source: Environmental science & technology [Environ Sci Technol] 2026 Jan 27; Vol. 60 (3), pp. 2259-2276. Date of Electronic Publication: 2026 Jan 13.
Publication Type: Journal Article; Review
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 0213155 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1520-5851 (Electronic) Linking ISSN: 0013936X NLM ISO Abbreviation: Environ Sci Technol Subsets: MEDLINE
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  Data: <searchLink fieldCode="AU" term="%22Gokhale+D%22">Gokhale D</searchLink>; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.<br /><searchLink fieldCode="AU" term="%22Cerrón-Calle+GA%22">Cerrón-Calle GA</searchLink>; School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, Arizona 85287, United States.<br /><searchLink fieldCode="AU" term="%22Kim-Fu+ML%22">Kim-Fu ML</searchLink>; Department of Chemistry, Oregon State University, Corvallis, Oregon 97331, United States.<br /><searchLink fieldCode="AU" term="%22Flores+K%22">Flores K</searchLink>; School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, Arizona 85287, United States.<br /><searchLink fieldCode="AU" term="%22Román+Santiago+A%22">Román Santiago A</searchLink>; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.<br /><searchLink fieldCode="AU" term="%22Tsai+SW%22">Tsai SW</searchLink>; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.<br /><searchLink fieldCode="AU" term="%22Aga+DS%22">Aga DS</searchLink>; Department of Chemistry, University at Buffalo, The State University of New York, Buffalo, New York 14260, United States.<br /><searchLink fieldCode="AU" term="%22Aich+N%22">Aich N</searchLink>; Department of Civil and Environmental Engineering, University of Nebraska - Lincoln, Lincoln, Nebraska 68588, Unites States.<br /><searchLink fieldCode="AU" term="%22Diallo+MS%22">Diallo MS</searchLink>; Division of Engineering and Applied Science, California Institute of Technology, Pasadena, California 91125, United States.<br /><searchLink fieldCode="AU" term="%22Doudrick+K%22">Doudrick K</searchLink>; Department of Civil and Environmental Engineering and Earth Sciences, University of Notre Dame, Notre Dame, Indiana 46556, United States.<br /><searchLink fieldCode="AU" term="%22Hanigan+D%22">Hanigan D</searchLink>; Department of Civil and Environmental Engineering, University of Nevada Reno, Reno, Nevada 89557, United States.<br /><searchLink fieldCode="AU" term="%22Hernández+Sánchez+R%22">Hernández Sánchez R</searchLink>; Department of Chemistry, Rice University, Houston, Texas 77005, United States.; Rice Advanced Materials Institute, Rice University, Houston, Texas 77005, United States.; Rice Sustainability Institute, Rice University, Houston, Texas 77005, United States.; Rice WaTER Institute, Rice University, Houston, Texas 77005, United States.<br /><searchLink fieldCode="AU" term="%22Howarter+J%22">Howarter J</searchLink>; School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States.; School of Sustainability Engineering and Environmental Engineering, Purdue University, West Lafayette, Indiana 47907, United States.<br /><searchLink fieldCode="AU" term="%22Jiang+JJ%22">Jiang JJ</searchLink>; Department of Chemistry, University of Cincinnati, Cincinnati, Ohio 45221, United States.<br /><searchLink fieldCode="AU" term="%22Jones+GD%22">Jones GD</searchLink>; Department of Biological and Ecological Engineering, Oregon State University, Corvallis, Oregon 97331, United States.<br /><searchLink fieldCode="AU" term="%22Lee+LS%22">Lee LS</searchLink>; School of Sustainability Engineering and Environmental Engineering, Purdue University, West Lafayette, Indiana 47907, United States.; School of Agronomy, Purdue University, West Lafayette, Indiana 47907, United States.<br /><searchLink fieldCode="AU" term="%22Liu+H%22">Liu H</searchLink>; Department of Chemical and Environmental Engineering, University of California, Riverside, California 92521, United States.<br /><searchLink fieldCode="AU" term="%22Manz+KE%22">Manz KE</searchLink>; Department of Environmental Health Sciences, University of Michigan, Ann Arbor, Michigan 48109, United States.<br /><searchLink fieldCode="AU" term="%22McKenzie+ER%22">McKenzie ER</searchLink>; Department of Civil and Environmental Engineering, Temple University, Philadelphia, Pennsylvania 19122, United States.<br /><searchLink fieldCode="AU" term="%22Padhye+LP%22">Padhye LP</searchLink>; The New York State Center for Clean Water Technology, Stony Brook University, Stony Brook, New York 11794, United States.; Department of Civil and Environmental Engineering, The University of Auckland, Auckland 1142, New Zealand.<br /><searchLink fieldCode="AU" term="%22Sankaran+RM%22">Sankaran RM</searchLink>; Department of Nuclear, Plasma, and Radiological Engineering, The Grainger College of Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.<br /><searchLink fieldCode="AU" term="%22Shepard+SM%22">Shepard SM</searchLink>; CHIPS R&D Office, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States.<br /><searchLink fieldCode="AU" term="%22Strathmann+TJ%22">Strathmann TJ</searchLink>; Department of Civil and Environmental Engineering, Colorado School of Mines, Golden, Colorado 80401, United States.<br /><searchLink fieldCode="AU" term="%22Venkatesan+AK%22">Venkatesan AK</searchLink>; Department of Civil and Environmental Engineering, New Jersey Institute of Technology, Newark, New Jersey 07102, United States.<br /><searchLink fieldCode="AU" term="%22Wong+MS%22">Wong MS</searchLink>; Department of Chemical and Biomolecular Engineering, Rice University, Houston, Texas 77005, United States.<br /><searchLink fieldCode="AU" term="%22Leet+R%22">Leet R</searchLink>; Leet Environmental Consulting, Portland, Oregon 97219, United States.<br /><searchLink fieldCode="AU" term="%22Speed+D%22">Speed D</searchLink>; GlobalFoundries, Inc., Malta, New York 12020, United States.<br /><searchLink fieldCode="AU" term="%22Field+JA%22">Field JA</searchLink>; Department of Environmental and Molecular Toxicology, Oregon State University, Corvallis, Oregon 97331, United States.<br /><searchLink fieldCode="AU" term="%22Westerhoff+P%22">Westerhoff P</searchLink>; School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, Arizona 85287, United States.<br /><searchLink fieldCode="AU" term="%22Su+X%22">Su X</searchLink>; Department of Chemical and Biomolecular Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.
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