| Authors: |
Gao Q; Henan Province Engineering Technology Research Center of MEMS Manufacturing and Applications, School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou, 450001, China., Guo Z; Henan Province Engineering Technology Research Center of MEMS Manufacturing and Applications, School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou, 450001, China. Electronic address: zwguo@zzu.edu.cn., Zhang S; Henan Province Engineering Technology Research Center of MEMS Manufacturing and Applications, School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou, 450001, China., Xia J; Department of Mechanical Engineering and Mechanics, Tsinghua University, Beijing, 100084, China., Li J; Henan Province Engineering Technology Research Center of MEMS Manufacturing and Applications, School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou, 450001, China., Yuan T; Department of Mechanical Engineering and Mechanics, Tsinghua University, Beijing, 100084, China., Chen J; Henan Province Engineering Technology Research Center of MEMS Manufacturing and Applications, School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou, 450001, China., Fang Y; Department of Mechanical Engineering and Mechanics, Tsinghua University, Beijing, 100084, China., Qiu J; Henan Province Engineering Technology Research Center of MEMS Manufacturing and Applications, School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou, 450001, China. Electronic address: qjjzzu@zzu.edu.cn., Wei R; Henan Province Engineering Technology Research Center of MEMS Manufacturing and Applications, School of Mechanics and Safety Engineering, Zhengzhou University, Zhengzhou, 450001, China; Industrial Technology Research Institute, Zhengzhou University, Zhengzhou, 450001, China. Electronic address: profwei@zzu.edu.cn. |
