| Authors: |
Lee J; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea.; Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, South Korea., Lee H; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Choi D; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon 16419, South Korea., Kim G; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon 16419, South Korea., Kim H; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon 16419, South Korea., Jeon J; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Ahn J; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon 16419, South Korea., Kim Y; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Back G; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon 16419, South Korea., Kim G; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Kim H; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Shim H; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon 16419, South Korea., Cho J; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Lee D; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Son S; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon 16419, South Korea., Ha J; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon 16419, South Korea., Lee S; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon 16419, South Korea., Yu D; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon 16419, South Korea., Jo Y; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea., Kim HU; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea.; Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, South Korea., Jang WJ; Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, South Korea.; Department of Physics, Ewha Womans University, Seoul 03760, South Korea., Kim T; School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, South Korea.; Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon 16419, South Korea.; SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, South Korea.; Department of Nano Science and Technology, Sungkyunkwan University, Suwon 16419, South Korea. |
