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Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors.

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Title: Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors.
Authors: Avraham M; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 320003, Israel., Nemirovsky Y; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 320003, Israel.
Source: Micromachines [Micromachines (Basel)] 2026 Jan 28; Vol. 17 (2). Date of Electronic Publication: 2026 Jan 28.
Publication Type: Journal Article
Journal Info: Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: <searchLink fieldCode="AU" term="%22Avraham+M%22">Avraham M</searchLink>; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 320003, Israel.<br /><searchLink fieldCode="AU" term="%22Nemirovsky+Y%22">Nemirovsky Y</searchLink>; Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 320003, Israel.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22MDPI%22">MDPI </searchLink><i>Country of Publication: </i>Switzerland <i>NLM ID: </i>101640903 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Print <i>ISSN: </i>2072-666X (Print) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%222072666X%22">2072666X </searchLink><i>NLM ISO Abbreviation: </i>Micromachines (Basel) <i>Subsets: </i>PubMed not MEDLINE
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=mdl&AN=41753827
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        Value: 10.3390/mi17020170
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      – Code: eng
        Text: English
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      – TitleFull: Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors.
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            NameFull: Avraham M
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            NameFull: Nemirovsky Y
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            – D: 28
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              Text: 2026 Jan 28
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              Y: 2026
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              Value: 17
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              Value: 2
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