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A new approach to probing the depths of multilayer structures in SEM.

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Title: A new approach to probing the depths of multilayer structures in SEM.
Authors: Zhdanov, G.1 GSZhdanov@mail.ru, Lozhkin, M.1
Source: Bulletin of the Russian Academy of Sciences: Physics. Nov2015, Vol. 79 Issue 11, p1340-1344. 5p.
Database: Mathematics Source
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        Value: 10.3103/S106287381511026X
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