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Monolithic finite element modeling of compressible fluid‐structure‐electrostatics interactions in MEMS devices.

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Bibliographic Details
Title: Monolithic finite element modeling of compressible fluid‐structure‐electrostatics interactions in MEMS devices.
Authors: Dutta, Suman1 (AUTHOR), Jog, C. S.1 (AUTHOR) jogc@iisc.ac.in
Source: International Journal for Numerical Methods in Fluids. Dec2024, Vol. 96 Issue 12, p2006-2050. 45p.
Database: Mathematics Source
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ISSN:02712091
DOI:10.1002/fld.5329