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A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators.

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Title: A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators.
Authors: Wall, Franziska1 (AUTHOR) Franziska.Wall2@bosch-sensortec.com, Schenk, Hermann A. G.1 (AUTHOR), Melnikov, Anton2 (AUTHOR), Kaiser, Bert2 (AUTHOR)
Source: Nonlinear Dynamics. Jan2025, Vol. 113 Issue 1, p275-287. 13p.
Database: Mathematics Source
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  Data: <searchLink fieldCode="JN" term="%22Nonlinear+Dynamics%22">Nonlinear Dynamics</searchLink>. Jan2025, Vol. 113 Issue 1, p275-287. 13p.
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      – Type: doi
        Value: 10.1007/s11071-024-10045-8
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      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 275
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              Text: Jan2025
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              Y: 2025
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