A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators.
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| Title: | A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators. |
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| Authors: | Wall, Franziska1 (AUTHOR) Franziska.Wall2@bosch-sensortec.com, Schenk, Hermann A. G.1 (AUTHOR), Melnikov, Anton2 (AUTHOR), Kaiser, Bert2 (AUTHOR) |
| Source: | Nonlinear Dynamics. Jan2025, Vol. 113 Issue 1, p275-287. 13p. |
| Database: | Mathematics Source |
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