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Ultra Clean Processing of Semiconductor Surfaces X

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Title: Ultra Clean Processing of Semiconductor Surfaces X
Description: Selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium
Authors: Paul Mertens, Marc Meuris, Marc Heyns
Resource Type: eBook.
Subjects: Semiconductors--Surfaces--Congresses
Categories: TECHNOLOGY & ENGINEERING / Materials Science / General
Database: eBook Collection (EBSCOhost)
FullText Links:
  – Type: ebook-pdf
Text:
  Availability: 0
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DbLabel: eBook Collection (EBSCOhost)
An: 517190
RelevancyScore: 1044
AccessLevel: 6
PubType: eBook
PubTypeId: ebook
PreciseRelevancyScore: 1044.26904296875
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  Data: Ultra Clean Processing of Semiconductor Surfaces X
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  Data: Selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium
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        Type: prePub
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      – Code: eng
        Text: English
    Subjects:
      – SubjectFull: Semiconductors--Surfaces--Congresses
        Type: general
    Titles:
      – TitleFull: Ultra Clean Processing of Semiconductor Surfaces X
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            NameFull: Paul Mertens
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            NameFull: Marc Meuris
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            NameFull: Marc Heyns
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            NameFull: Paul Mertens
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            NameFull: Marc Meuris
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            NameFull: Marc Heyns
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            – D: 01
              M: 01
              Type: published
              Y: 2012
            – D: 04
              M: 02
              Type: profile
              Y: 2014
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              Value: 9783038137009
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              Value: 00187
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