APA (7th ed.) Citation

Jantsch, W., & Schäffler, F. (2011). Gettering and Defect Engineering in Semiconductor Technology XIV.

Chicago Style (17th ed.) Citation

Jantsch, W., and Friedrich Schäffler. Gettering and Defect Engineering in Semiconductor Technology XIV. 2011.

MLA (9th ed.) Citation

Jantsch, W., and Friedrich Schäffler. Gettering and Defect Engineering in Semiconductor Technology XIV. 2011.

Warning: These citations may not always be 100% accurate.