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Ultra Clean Processing of Semiconductor Surfaces XI

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Title: Ultra Clean Processing of Semiconductor Surfaces XI
Description: Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
Authors: Paul Mertens, Marc Meuris, Marc Heyns
Resource Type: eBook.
Subjects: Electrical engineering--Congresses, Semiconductors--Surfaces--Congresses
Categories: TECHNOLOGY & ENGINEERING / Materials Science / General
Database: eBook Collection (EBSCOhost)
FullText Links:
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Text:
  Availability: 0
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DbLabel: eBook Collection (EBSCOhost)
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RelevancyScore: 1051
AccessLevel: 6
PubType: eBook
PubTypeId: ebook
PreciseRelevancyScore: 1050.81640625
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  Data: Ultra Clean Processing of Semiconductor Surfaces XI
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  Data: Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium
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RecordInfo BibRecord:
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      – Code: 537.622
        Scheme: ddc
        Type: prePub
    Languages:
      – Code: eng
        Text: English
    Subjects:
      – SubjectFull: Electrical engineering--Congresses
        Type: general
      – SubjectFull: Semiconductors--Surfaces--Congresses
        Type: general
    Titles:
      – TitleFull: Ultra Clean Processing of Semiconductor Surfaces XI
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Paul Mertens
      – PersonEntity:
          Name:
            NameFull: Marc Meuris
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            NameFull: Marc Heyns
      – PersonEntity:
          Name:
            NameFull: Paul Mertens
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          Name:
            NameFull: Marc Meuris
      – PersonEntity:
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            NameFull: Marc Heyns
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          Dates:
            – D: 01
              M: 01
              Type: published
              Y: 2013
            – D: 21
              M: 03
              Type: profile
              Y: 2014
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              Value: 9783037855270
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              Value: 9783038139089
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              Value: 00195
          Titles:
            – TitleFull: Ultra Clean Processing of Semiconductor Surfaces XI
              Type: main
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