APA (7th ed.) Citation

Vasilʹev, V. I. (2014). Thin Film Chemical Vapor Deposition in Electronics: Equipment, Methodology, and Thin Film Growth Experience.

Chicago Style (17th ed.) Citation

Vasilʹev, V. I︠U︡. Thin Film Chemical Vapor Deposition in Electronics: Equipment, Methodology, and Thin Film Growth Experience. 2014.

MLA (9th ed.) Citation

Vasilʹev, V. I︠U︡. Thin Film Chemical Vapor Deposition in Electronics: Equipment, Methodology, and Thin Film Growth Experience. 2014.

Warning: These citations may not always be 100% accurate.