rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of sputter deposition technology: rinciples, technology and aplications
    sub title: principles, technology and applications
  name:
    name part: Wasa, Kiyotaka
    role:
      role term: creator
  name:
    name part: Hayakawa, Shigeru
    name part: 1925-
  type of resource: text
  origin info:
    place:
      place term: xxu
    place:
      place term: New Jersey
    publisher: Noyes Publications
    date issued: 1991
    issuance: monographic
  language:
    language term: eng
  physical description:
    extent: 304 páginas : ilustraciones ; 25 cm.
  table of contents: Thin film materials and devices -- Thin film processes -- Sputtering phenomena -- Sputtering systems -- Deposition of compound thin films -- Microfabrication by sputtering
  target audience: specialized
  note: Kiyotaka Wasa, Shigeru Hayakawa.
  note: Incluye índice
  subject:
    geographic code: n-xxu--
  subject:
    topic: Semiconductores
  subject:
    topic: Películas delgadas
  classification: 621.38152 W312h
  identifier: 0815512805
  record info:
    record content source: CO-BoSNA
    record creation date: 010604
    record change date: 20260706114542.0
    record identifier: 000009422
    language of cataloging:
      language term: spa