http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Handbook of sputter deposition technology: rinciples, technology and aplications
Thin film materials and devices -- Thin film processes -- Sputtering phenomena -- Sputtering systems -- Deposition of compound thin films -- Microfabrication by sputtering