http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
xiv, 518 páginas : ilustraciones ; 24 cm.
Thin film materials and derives -- Thin film processes -- Sputtering phenomena -- Suttering systems -- Deposition of compound thin films -- Structural control of compound thin films: perovskite and nanometer oxide thin films.
Kiyotaka Wasa, Mokoto Kitabateke, Hideaki Adachi.
Incluye referencias bibliográficas e índices