rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Thin film materials technology
    sub title: sputtering of compound materials
  name:
    name part: Wasa, Kiyotaka
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: xxu
    place:
      place term: New York
    publisher: William Andrew Publishing
    date issued: c2004
    date issued: 2004
    copyright date: ^^^^
    issuance: monographic
  language:
    language term: eng
  physical description:
    extent: xiv, 518 páginas : ilustraciones ; 24 cm.
  table of contents: Thin film materials and derives -- Thin film processes -- Sputtering phenomena -- Suttering systems -- Deposition of compound thin films -- Structural control of compound thin films: perovskite and nanometer oxide thin films.
  target audience: specialized
  note: Kiyotaka Wasa, Mokoto Kitabateke, Hideaki Adachi.
  note: Incluye referencias bibliográficas e índices
  subject:
    geographic code: n-xxu---
  subject:
    topic: Nanotecnología
  subject:
    topic: Alta tecnología
  subject:
    topic: Películas delgadas
  classification: 621.38152 W312t
  identifier: 0815514832
  record info:
    record content source: CO-BoSNA
    record creation date: 051017
    record change date: 20260706111244.0
    record identifier: 000003502
    language of cataloging:
      language term: spa