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Atmospheric pressure plasma enhanced spatial ALD of silver.

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Bibliographic Details
Title: Atmospheric pressure plasma enhanced spatial ALD of silver.
Authors: van den Bruele, Fieke J.1, Fieke.vandenBruele@tno.nl, Smets, Mireille1, Illiberi, Andrea1, Creyghton, Yves2, Buskens, Pascal3, Roozeboom, Fred4, Poodt, Paul1
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan/Feb2015, Vol. 33 Issue 1, p1-6, 6p
Database: Applied Science & Technology Source
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