Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure.
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| Title: | Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure. |
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| Authors: | Imbert, B.1, imbert.bruno@cea.fr, Blot, X.1, Tauzin, A.1, Salvetat, T.1, Lagoutte, E.1, Lecouvey, C.1, Chaira, T.1, Larrey, V.1, Bridoux, C.1, Fournel, F.1, Delaye, V.1, Papon, A.-M.1, Moriceau, H.1, Carron, V.1 |
| Source: | Microsystem Technologies; May2015, Vol. 21 Issue 5, p973-977, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09467076 |
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| DOI: | 10.1007/s00542-015-2438-2 |
