APA (7th ed.) Citation

Imbert, B., Blot, X., Tauzin, A., Salvetat, T., Lagoutte, E., Lecouvey, C., . . . Carron, V. (2015). Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure. Microsystem Technologies, 21(5), 973. https://doi.org/10.1007/s00542-015-2438-2

Chicago Style (17th ed.) Citation

Imbert, B., et al. "Mechanical Understanding of 100 Mm InP and GaAs Direct Bonded Heterostructure." Microsystem Technologies 21, no. 5 (2015): 973. https://doi.org/10.1007/s00542-015-2438-2.

MLA (9th ed.) Citation

Imbert, B., et al. "Mechanical Understanding of 100 Mm InP and GaAs Direct Bonded Heterostructure." Microsystem Technologies, vol. 21, no. 5, 2015, p. 973, https://doi.org/10.1007/s00542-015-2438-2.