Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure.
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| Title: | Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure. |
|---|---|
| Authors: | Imbert, B.1, imbert.bruno@cea.fr, Blot, X.1, Tauzin, A.1, Salvetat, T.1, Lagoutte, E.1, Lecouvey, C.1, Chaira, T.1, Larrey, V.1, Bridoux, C.1, Fournel, F.1, Delaye, V.1, Papon, A.-M.1, Moriceau, H.1, Carron, V.1 |
| Source: | Microsystem Technologies; May2015, Vol. 21 Issue 5, p973-977, 5p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 102187318 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=102187318 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s00542-015-2438-2 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 5 StartPage: 973 Titles: – TitleFull: Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Imbert, B. – PersonEntity: Name: NameFull: Blot, X. – PersonEntity: Name: NameFull: Tauzin, A. – PersonEntity: Name: NameFull: Salvetat, T. – PersonEntity: Name: NameFull: Lagoutte, E. – PersonEntity: Name: NameFull: Lecouvey, C. – PersonEntity: Name: NameFull: Chaira, T. – PersonEntity: Name: NameFull: Larrey, V. – PersonEntity: Name: NameFull: Bridoux, C. – PersonEntity: Name: NameFull: Fournel, F. – PersonEntity: Name: NameFull: Delaye, V. – PersonEntity: Name: NameFull: Papon, A.-M. – PersonEntity: Name: NameFull: Moriceau, H. – PersonEntity: Name: NameFull: Carron, V. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 05 Text: May2015 Type: published Y: 2015 Identifiers: – Type: issn-print Value: 09467076 Numbering: – Type: volume Value: 21 – Type: issue Value: 5 Titles: – TitleFull: Microsystem Technologies Type: main |
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