Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor.
Saved in:
| Title: | Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor. |
|---|---|
| Authors: | Li, D.1, dyli@yzu.edu.cn, Goullet, A.2, Carette, M.3, Granier, A.2, Zhang, Y.1, Landesman, J.P.4 |
| Source: | Vacuum; Sep2016, Vol. 131, p231-239, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
|---|---|
| DOI: | 10.1016/j.vacuum.2016.07.004 |
