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Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor.

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Title: Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor.
Authors: Li, D.1, dyli@yzu.edu.cn, Goullet, A.2, Carette, M.3, Granier, A.2, Zhang, Y.1, Landesman, J.P.4
Source: Vacuum; Sep2016, Vol. 131, p231-239, 9p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 117010721
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor.
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  Data: <searchLink fieldCode="AU" term="%22Li%2C+D%2E%22">Li, D.</searchLink><relatesTo>1</relatesTo>, <i>dyli@yzu.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Goullet%2C+A%2E%22">Goullet, A.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Carette%2C+M%2E%22">Carette, M.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Granier%2C+A%2E%22">Granier, A.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Y%2E%22">Zhang, Y.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Landesman%2C+J%2EP%2E%22">Landesman, J.P.</searchLink><relatesTo>4</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>; Sep2016, Vol. 131, p231-239, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=117010721
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        Value: 10.1016/j.vacuum.2016.07.004
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      – Code: eng
        Text: English
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      – TitleFull: Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor.
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              Text: Sep2016
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