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Interface water diffusion in silicon direct bonding.

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Bibliographic Details
Title: Interface water diffusion in silicon direct bonding.
Authors: Tedjini, M.1, Fournel, F.1, Moriceau, H.1, Larrey, V.1, Landru, D.2, Kononchuk, O.2, Tardif, S.3, Rieutord, F.3
Source: Applied Physics Letters; 9/12/2016, Vol. 109 Issue 11, p111603-1-111603-3, 3p, 1 Black and White Photograph, 1 Diagram, 4 Graphs
Database: Applied Science & Technology Source
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