Combinatorial refinement of thin-film microstructure, properties and process conditions: iterative nanoscale search for self-assembled TiAlN nanolamellae.
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| Title: | Combinatorial refinement of thin-film microstructure, properties and process conditions: iterative nanoscale search for self-assembled TiAlN nanolamellae. |
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| Authors: | Zalesak, J.1,2, Todt, J.2, Pitonak, R.3, Köpf, A.3, Weißenbacher, R.3, Sartory, B.4, Burghammer, M.5, Daniel, R.1, Keckes, J.2 |
| Source: | Journal of Applied Crystallography; Dec2016, Vol. 49 Issue 6, p2217-2225, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218898 |
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| DOI: | 10.1107/S1600576716017258 |