Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation.
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| Title: | Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation. |
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| Authors: | Gomes Perini, L. A.1,2, luis.gomesperini@cea.fr, Bleuet, P.1,2, Filevich, J.3, Parker, W.3, Buijsse, B.4, Kwakman, L. F. Tz.4 |
| Source: | Review of Scientific Instruments; Jun2017, Vol. 88 Issue 6, p1-10, 10p, 1 Color Photograph, 4 Diagrams, 1 Chart, 7 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/1.4989406 |