Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation.

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Bibliographic Details
Title: Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation.
Authors: Gomes Perini, L. A.1,2, luis.gomesperini@cea.fr, Bleuet, P.1,2, Filevich, J.3, Parker, W.3, Buijsse, B.4, Kwakman, L. F. Tz.4
Source: Review of Scientific Instruments; Jun2017, Vol. 88 Issue 6, p1-10, 10p, 1 Color Photograph, 4 Diagrams, 1 Chart, 7 Graphs
Database: Applied Science & Technology Source
Description
ISSN:00346748
DOI:10.1063/1.4989406